ULVAC’s base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, flat panel display, solar cells, and others.
ULVAC has leak detectors available not only for leak tests for vacuum systems but also for other applications ranging from packing package leak detection to the special detection of gas leaks.
Charging Machine is a perfect solution for high for high accuracy and fast speed charging, integrating multiple advantaged and advanced technology.
OC Series refrigeration oil charging Machine is the perfect solution of high accuracy & high charging speed.
ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.
This equipment, employing vertical double door open mechanism is applied to deposit Al reflection film and superposition SIOx protection film on the reflection board of automotive lighting parts and decoration. Perform film metallization on the PC,BMC,ABS metal materials.
Roll coaters are available for a variety of applications ranging from gold/silver thread coating to holographic coating for anti-counterfeiting and additionally flexible substrate coating.
The application of vacuum cooling technology has caused a revolution in the green vegetables cold chain distribution system. In summer time, vegetables tend to deteriorate very fast after harvest from the field under high temperature.
The application of vacuum cooling technology has caused a revolution in the green vegetables cold chain distribution system. In summer time, vegetables tend to deteriorate very fast after harvest from the field under high temperature.
Vacuum Freeze Drying / Vacuum Drying System for low-volume production and research by the pharmaceutical industry require space-saving designs, low cost and high functionality. ULVAC has released the DFM Series to meet these demands.
ULVAC's base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, flat panel display, solar cells, and others.
ULVAC
Helium leak testing is a highly sensitive method used to detect leaks in sealed systems, particularly in high-performance equipment such as vacuum systems, cryogenic components, and semiconductor devices. ULVAC is a leading manufacturer of vacuum technology and related equipment, and they offer helium leak testing systems designed for precision leak detection.
Our Refrigerant Charging Machines are specialized systems designed for the precise and efficient charging of refrigerants into HVAC (Heating, Ventilation, and Air Conditioning) systems, refrigeration equipment, and other similar applications. These machines are essential for industries that require accurate control of refrigerant amounts and proper management of refrigerant gas.
ULVAC offers vacuum furnaces (for melting, thermal treatment and CVD) used in general industrial fields and semiconductor / electronic device fields.
Batch-type Sputtering Systems SV Series
Multi-Chamber Deposition System Model: ENTRON-EXX
Multi-chamber Sputtering System ENTRONTM-EX W300
Multi-chamber Sputtering SystemMLXTM-3000N
Optical Filters and Coating
ULDiS Series
Backside Metalization Sputtering System SRH Series
Cluster-type Sputtrering System SME-200E
Sputtering System CS-200
Single-wafer film deposition
and processing system
uGmni-200 and 300
Loadlock Deposition System
LX-200 Series
Cluster-type Sputtering Systems SMD Series
Vertical-type Sputtering Systems SMD Series
SOPHI-400 Series
IH-860PSIC Series
SOPHI-200/260 Series
ULVAC offers environmentally-friendly (no solutions are needed), high-productivity technologies for resist removal, which is essential in production processes for electronic and semiconductor devices.
NA-1300 / NA-8000 (For wafer Level Packaging)
NA-1500 Series (PLP)
uGmni-200 and 300
ULVAC offers cluster-type and batch-type chemical vapor deposition systems and additionally offers systems specially designed for development, ranging from PE-CVD systems essential for a-Si and passive film deposition to metal CVD and thermal CVD systems.
CMD Series
CME-200E/400 Series
C-200 Series
uGmni-200 and 300 Series
CX400, 500 Series
ULVAC’s vacuum evaporation systems provide technologies essential for next-generation electronic devices and industrial devices, ranging from plate to flexible substrates.
ei Series
EVD Series
EWE series
EWA Series
EWG Series
ULVAC solutions range from vacuum technology-based services to analysis services and after-sales services.
Address: 110/6 Moo.13 Soi 25/2
Kingkaew Rd.,Rachathewa,
Bangplee,Samutprakan 10540
TEL: +66 2 738 8883
FAX: +66 2 738 8200
