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Model: DC PULSE

Pulsed and DC power supply systems
DC PULSE power supply_Model:DC PULSE

The "Model:DC PULSE" is a pulsed power supply that is effective in suppressing abnormal discharges that occur in reactive processes.

This power supply reverses the output voltage at a set period and cancels out charge accumulation (charge-up) on the target surface, thereby suppressing abnormal discharge and improving yield and throughput.

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Features

  • High power can be input by suppressing abnormal discharge.
  • Reduces substrate damage caused by arcing
  • Oscillation frequency can be set from 5kHz to 250kHz for output.
  • Up to 6 units can be operated in parallel (only combinations of the same model)
  • By changing the operating mode, it can also be used as a DC power supply with a low arc function.

Specifications

Model DC-5-P DC-10-P
Input Specifications Input voltage 3-phase AC208V
Input Capacity 8kVA or less 13.5kVA or less
Output Specifications Rated power 5kW 10kW
Ratedcurrent 12.5A 25A
Rated voltage

5k-150kHz：800V, 155k-250kHz：650V
Frequency 5k-250kHz
Reverse voltage pulse width 0.4μ-5.0μs
Ignition voltage 1500V
control Control accuracy The higher of ±0.5% or less of the rated output or ±1% of the set value
Control Warranty Coverage 10-100% of rated power value
Interface Analog/Digital, Serial communication（RS232C or RS485）
Parallel operation Up to 6units can be controlled by master/slave communication
Cooling method Forced air cooling
Dimensions(W×D×H) does not contain
protrusions		 483×630×133（mm）
Weight 29kg 36kg
Standard CE, KC, SEMI F47, RoHS（Europe）