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Power Supply
A plasma generation power supply, also known as a deposition power supply, is a device that generates plasma by applying voltage between electrodes. By utilizing this technology, various vacuum processes such as PVD (e.g., sputtering), CVD, etching, and ashing can be performed. These processes enable the formation or removal of films on substrates, thereby creating new added value. This technology is widely applied in many everyday products around us.
The "Model:DC PULSE" is a pulsed power supply that is effective in suppressing abnormal discharges that occur in reactive processes.
This power supply reverses the output voltage at a set period and cancels out charge accumulation (charge-up) on the target surface, thereby suppressing abnormal discharge and improving yield and throughput.