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Process Gas Monitor
Gas analyzers (process gas monitors) are primarily used in semiconductor manufacturing and electronic device production processes to monitor gas components and concentrations in real-time. The main features are as follows: They measure specific gas components with high precision, helping control the process. They monitor the state of process gases in real-time, enabling early detection of abnormalities and optimization of processes.
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).