Product Fillter
Vacuum Pump
A vacuum pump is a machine that exhausts gas from a sealed space and creates a pressure state lower than atmospheric pressure. There are many types of vacuum pumps, depending on the exhaust mechanism and exhaust speed. They must be used according to the purpose and application.
Oil Diffusion Pump
ULVAC's oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. They are particularly well-suited for use in metallurgy, plastic coating and chemical manufacturing, where large quantities of gas have to be pumped away as quickly as possible.
Oil Diffusion Pump
ULVAC oil diffusion pump PFL-type is designed and manufactured based on our extensive research and manufacturing experience. We meet customer's needs with 4 models line-up including 22B to 52B which are used in many high-vacuum production facilities, and its practical performance is highly appreciated.
Oil Diffusion Pump
Oil diffusion vacuum pumps work by evaporating heated oil to generate oil vapor. This vapor is ejected at high speed through a nozzle, colliding with gas molecules. The collided gas molecules are carried along with the flow of oil vapor towards the exhaust, creating a vacuum. This process is particularly effective for applications requiring high vacuum levels.
Ion Pump
Sputter ion pumps utilize electric and magnetic fields to ionize gas molecules. These ionized molecules are accelerated by the electric field and collide with the surface of a solid target. This collision embeds the molecules into the surface, creating a vacuum. This process is particularly effective for the removal of inert and reactive gases.
Turbo Molecular Pump
A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Turbo Molecular Pump
Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.
Turbo Molecular Pump
The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
Turbo Molecular Pump
This pump has a high compression ratio.
It allows for the miniaturization of auxiliary pumps.
Turbo Molecular Pump
"Model:YTP" version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
Turbo Molecular Pump
This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.
Cryo Pump
A cryopump is a cryogenic vacuum pump designed to achieve conditions ranging from high vacuum to ultra-high vacuum. This pump efficiently captures gases by condensing and adsorbing them onto an internally installed cryogenic surface. One of the most significant features of the cryopump is its ability to provide a clean vacuum environment free from oil contamination.
Vacuum Pumping System
It is the small high vacuum pumping system which made a mechanical booster pump, an oil rotary vacuum pump, and piping unify compactly.
Vacuum Pumping System
"Model:YMV" is a frame unit for combining a mechanical booster pump and an oil rotary vacuum pump.
4 types of frame units in accordance with the pump exhaust amount have prepared.
It has an independent frame design that emphasizes the pump maintainability, making ideal for production usage.
Mechanical Booster Pump
The MBS series mechanical booster pump utlizes a brushless DC brushless motor coupled magnetically with the pump rotors to guarantee that you are boosting your pumping power, not your leaks. This non-contact seal reduces the power usage 60% over previous models by sharply reducing the mechanical loss.
Mechanical Booster Pump
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
Mechanical Booster Pump
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The "Model:PRC" is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
Mechanical Booster Pump
The Model:PMB Ver. D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are selectable as option.
Small Oil Rotary Vacuum Pump
The GCD Series direct drive, oil rotary vacuum pump is corrosion resistant making it an ideal pumping solution for toxic and corrosive gases. Three different sizes are available from 50 to 200 L/min.
Small Oil Rotary Vacuum Pump
The GHD is designed with a magnetically coupled motor to eliminate the problem of shaft seal leakage, and improve the life of the motor. Available in multiple sizes to accommodate the precise needs of your application.
Small Oil Rotary Vacuum Pump
The GLD series of direct drive rotary vane pumps is ULVAC's reliable high performance pump available in a wide range of pumping speeds from 48 up to 336 L/min. Featuring low vibration and low noise the GLD is ideal for a wide range of sensitive applications and is the choice pump for many OEMs.