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Model: SH200-A / R / E

Hot Cathode Gauge

New model of transducer type "G-TRAN Multi Ionization Gauge" that is capable of connection to differet type sensor heads.

Model:ST200-A / R / E New model of transducer type "G-TRAN Multi Ionization Gauge" that is capable of connection to differet type sensor heads.

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Features

  • ULVAC own concept: Capable of connection of different measurement range sensor heads according to application.
  • Compact: Significantly miniaturized compared to the previous model (56% reduction of controller volume). World’s smallest class.
  • High usability: Set point setting, condition check, etc. by connecting PC/Android.
  • Larger selection: EtherCAT spec to be available in addition to analog output spec and serial communication spec.
  • Filament life notification function: An advance warning can be made before the life of ionization vacuum gauge by watching flilament power.
  • Wide range measuremnt: Measurment from atmospheric pressure to ultra high vacuum (1 x 10+5 to 5 x 10-8Pa) is possible (when using with an optional unit SWU10-R).
  • Precise atmospheric pressure sensing: Atmospheric pressure check for chamber open is available (when using with an optional unit SAU).

Applications

  • Process control in high vaccuum range for vacuum equipments for semiconductors or electric devices.
  • Ultimate pressure check for in-line or batch type vacuum equipments which have many process chambers.
  • Pressure measurement for high vacuum or ultra-high vacuum equipments.

Specifications

Model SH200-A SH200-R ST200-E
(scheduled for release)
Type Analog output type Serial communication type EtherCAT communication type
Applicable ionization
gauge sensor head		 M-44(NW16), M-45(NW25), M-46(ICF070)
Connectable sensors Multi ionization gauge SH200: 1
Pirani vacuum gauge sensor unit SWU10-R: 1 (option)
Pressure sensro unit SAU: 1 (option)
Repeatability (N2) SH200 simple mode: ±2％
Sampling time 60 ms, 5x moving average
Value output Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade
Pressure conversion equation: V=7.25+0.75×(LogP-2) P=10^{(V-7.25)/0.75+2}
Update time 60msec
Control input signals FIL ON/OFF、FIL　1/2、DEGAS ON/OFFOperates with open collector input, negative logic - -
Control output signals Sensor error, Setpoint 1/2/3, Emission valid
Watch of electric power of filament
Rating: 24VMAX、50mAMAX
Saturation voltage:1V		 - -
Communication type - RS232C/RS-485 EtherCAT
LED display POWER: Power, ERROR LED (Blinking pattern and color change depending on each mode)
Emission current 1mA (1×10-3Pa or lower), 10μA (1×10-3Pa or higher)
Degas Method Electron bombard type 1mA, 330V
Maximum pressure of sensor 2×10+5Pa (1.5 x 10+3 Torr, 2 x 10+3 mbar) (Absolute pressure)
＊Need separate measures as a capacity to resist pressure, such as flange and clamp
Internal volume of sensor 17cm3(M-44), 19cm3(M-45), 17cm3(M-46)
Operating temperature range 10 to 50℃ (50 to 122?)
Operating humidity range 15 to 80% (not condensing)
Storage temperature -20 to 65℃ (-4 to 149?) (At non-energizing, not condensing)
IP rating IP30
Power supply voltage DC20 to 28V (Ripple, Noise 1% or less) Lower than 8W
Input/output connector D-sub15-pin (M2.6 screw)
Weight Sensor unit: approx. 280g, sensor head (M-44/45): 80g, (M-46): 300g
Dimension W x D x H 69mm×63mm×90mm (sensor unit only)
Applicable standard CE
Option Multi Ionization Gauge Sensor head M-44(NW16), M-45(NW25), M-46(ICF070)
Material of gas contacting sections: Filament 1, 2 -Ir/Y2O3
Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating
Pirani Vacuum Gauge SWU10-R *Previous model SPU also available
Pirani Vacuum Gauge Sensor head SWP-16(NW16), SWP-25(NW25), SWP-R1/8(R1/8), SWP-P18(Φ18 pipe end), SWP-P15(Φ15 pipe end), SWP-CF16(ICF034)
Material of gas contacting sections : Filament-Pt, Other-BS/Ni plating, Ni, Solder
Pressure switch SAU(NW16) Material of gas contacting sections : SUS316L
Unit cable GUC-200P (for SWU10-R) ：0.5m, 1m, 2m
GUC-200A (for SAU) ：0.5m, 1m, 2m
Display unit 1CH：ISG1(DC24V)
Display cable Cable betweeen SH200 and desiplay unit
2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m
Connector I/O connector (D-sub15-soket（M2.6mm screw))
Others Test certificate, Calibration certificate

 

“Model:SH200” have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SWU10-R), and triple combination mode with a multi ionization gauge, a pirani gauge (SWU10-R) and a pressure switch (SAU)

Mode SH200-A/SH200-R/SH200-E
Simple mode		 SH200-A/SH200-R/SH200-E
＋SWU10-R
Combination mode		 SH200-A/SH200-R/SH200-E
＋SWU10-R＋SAU
Triple combination mode
Measurable pressure range 5.0×10-8 to 1.0×10+1Pa 5.0×10-8 to 1.0×10+5Pa 5.0×10-8 to 1.0×10+5Pa
Accuracy 5.0×10-8 to 1.0×10+1Pa：
±15%		 5.0×10-8 to 1.0×10-1Pa：±15%
4.0×10-1 to 3.0×10+0Pa：±10‐±15%
3.0×10+0 to 1.0×10+4Pa：±10%
1.0×10+4 to 1.0×10+5Pa：±20%		 5.0×10-8 to 4.0×10-1Pa：±15%
4.0×10-1 to 3.0×10+0Pa：±10‐±15%
3.0×10+0 to 1.0×10+4Pa：±10%
1.0×10+4 to 3.0×10+5Pa：±3%F.S.(3.0×10+3Pa･Base temperature: 25℃)
Connection image SH200+SWU10-R.png SH200+SWU10-R+SAU.png
Measurable pressure range image SH200_i.png

Triple combination can be used when “atmospheric pressure” check required to open chamber.

 

Image of coneection with PC/smartphone

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Application software "UL-MOBI"

For PC Download from ULVAC's website "ULVAC SHOWCASE" download center
For smartphone Download from Google Play

 

Compatible devices

PC Windows 10 64 bit or later
Smartphone Android 6 or later, USB TypeC

 

Ordering code

contact the nearest distributor regarding other combinations than the following

Main unit Sensor head Fitting type Ordering code
SH200-A (analog output spec) M-44 NW16 210006962800
M-45 NW25 210006962900
M-46 ICF070 210006963000
Without sensorhead － 210006963100
SH200-A + pirani unit SWU10-R combination
(unit cable 5m)		 M-44/SWP-16 NW16/NW16 210006969400
M-45/SWP-25 NW25/NW16 210006969500
M-46/ SWP-CF16 ICF070/ICF034 210006969600
SH200-R (serial communication spec) M-44 NW16 210006963500
M-45 NW25 210006963600
M-46 ICF070 210006963700
Without sensorhead － 210006963800

 

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