Equipment
ULVAC has been involved in this business sector since the emergence of vacuum technology in the 1950s. Leveraging the fundamental technology it has developed so far, ULVAC currently provides various solutions across wide-ranging industries, including the automobile, pharmaceutical, and food industries.

Helium Leak Test
Helium leak testing is a highly sensitive method used to detect leaks in sealed systems, particularly in high-performance equipment such as vacuum systems, cryogenic components, and semiconductor devices. ULVAC is a leading manufacturer of vacuum technology and related equipment, and they offer helium leak testing systems designed for precision leak detection.
Helium Leak Test
Helium leak testing is a highly sensitive method used to detect leaks in sealed systems, particularly in high-performance equipment such as vacuum systems, cryogenic components, and semiconductor devices. ULVAC is a leading manufacturer of vacuum technology and related equipment, and they offer helium leak testing systems designed for precision leak detection.

Refrigerant Charging
Our Refrigerant Charging Machines are specialized systems designed for the precise and efficient charging of refrigerants into HVAC (Heating, Ventilation, and Air Conditioning) systems, refrigeration equipment, and other similar applications. These machines are essential for industries that require accurate control of refrigerant amounts and proper management of refrigerant gas.
Refrigerant Charging
Our Refrigerant Charging Machines are specialized systems designed for the precise and efficient charging of refrigerants into HVAC (Heating, Ventilation, and Air Conditioning) systems, refrigeration equipment, and other similar applications. These machines are essential for industries that require accurate control of refrigerant amounts and proper management of refrigerant gas.

Oil Charging
Oil Charging System OC Series refrigeration oil charging Machine is the perfect solution of high accuracy & high charging speed.
Oil Charging
Oil Charging System OC Series refrigeration oil charging Machine is the perfect solution of high accuracy & high charging speed.

Evaporation System
ULVAC’s vacuum evaporation systems provide technologies essential for next-generation electronic devices and industrial devices, ranging from plate to flexible substrates.
Evaporation System
ULVAC’s vacuum evaporation systems provide technologies essential for next-generation electronic devices and industrial devices, ranging from plate to flexible substrates.

Vacuum Furnace
ULVAC offers vacuum furnaces (for melting, thermal treatment and CVD) used in general industrial fields and semiconductor / electronic device fields.
Vacuum Furnace
ULVAC offers vacuum furnaces (for melting, thermal treatment and CVD) used in general industrial fields and semiconductor / electronic device fields.

Sputtering System
ULVAC’s sputtering systems have the best track record in the industry.
Sputtering System
ULVAC’s sputtering systems have the best track record in the industry.

Ashing System
ULVAC offers environmentally-friendly (no solutions are needed), high-productivity technologies for resist removal, which is essential in production processes for electronic and semiconductor devices.
Ashing System
ULVAC offers environmentally-friendly (no solutions are needed), high-productivity technologies for resist removal, which is essential in production processes for electronic and semiconductor devices.

Dry Etching System
ULVAC offers etching systems to meet every need for hard-to-etch materials, from those for new nonvolatile memory to compound semiconductors.
Dry Etching System
ULVAC offers etching systems to meet every need for hard-to-etch materials, from those for new nonvolatile memory to compound semiconductors.

Ion implantation
A high-performance ion implantation system series for semiconductor devices
Ion implantation
A high-performance ion implantation system series for semiconductor devices