ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.

Gas analyzers (process gas monitors) are primarily used in semiconductor manufacturing and electronic device production processes to monitor gas components and concentrations in real-time. The main features are as follows: They measure specific gas components with high precision, helping control the process. They monitor the state of process gases in real-time, enabling early detection of abnormalities and optimization of processes.

Leak detectors are instruments for leak testing using tracer gases (helium and hydrogen). This method is widely used in many industries, including vacuum equipment, because it can detect very small leaks.

A vacuum valve is a valve used to control a vacuum environment. It is mainly used to adjust, stop, or release the flow of gas in a vacuum system (e.g. vacuum pump or vacuum device). In a vacuum environment, work is carried out at a pressure much lower than normal air pressure, so the valves are designed to be tightly sealed and to prevent gas leakage.

A plasma generation power supply, also known as a deposition power supply, is a device that generates plasma by applying voltage between electrodes. By utilizing this technology, various vacuum processes such as PVD (e.g., sputtering), CVD, etching, and ashing can be performed. These processes enable the formation or removal of films on substrates, thereby creating new added value. This technology is widely applied in many everyday products around us.