Product Fillter

MODEL: CRYO-U

Cryo Pump

A cryopump is a cryogenic vacuum pump designed to achieve conditions ranging from high vacuum to ultra-high vacuum. This pump efficiently captures gases by condensing and adsorbing them onto an internally installed cryogenic surface. One of the most significant features of the cryopump is its ability to provide a clean vacuum environment free from oil contamination.

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Features

  • Provide Ultra clean vacuum which is exclusive to our cryo pumps.
  • Vacuum any kind of gas.
  • No liquid helium needed means low running cost.
  • Can be installed in any orientation,
  • Easy operation.
  • Higher pumping speed compared to ion pumps or turbo molecule pumps.

Application

  • Vacuum deposition equipment.
  • Semiconductor process equipment.
  • Accelerating device
  • Surface analysis device.
  • Other equipment that require clean
  • high vacuum or ultra high vacuum
  • Sputtering equipment
  • Ion implanter
  • Nuclear fusion device
  • Space simulation chamber

Specifications

MODEL  CRYO-U4H  CRYO-U6H  CRYO-U8H  CRYO-U10H  CRYO-U12H CRYO-U16/U16P CRYO-U20P  CRYO-U20H  CRYO-U22P  CRYO-U22WB  CRYO-U22H  CRYO-U30H
CRYO-U16  CRYO-U16P
Pumping Speed (20℃) Nitroge n L/S 450 750 1,700 2,400 4,000   5,000 10,000 10,000 11,500 13,000 17,000 28,000
Hydrog en  500 1,100 2,700 3,600 6,000 10,000 18,000 18,000 14,000 16,500 25,000 43,000
Argon  370 620 1,400 2,000 3,300 4,200 8,400 8,400 9.7 11,000 14,000 23,000
Water 1,100 2,100 4,000 6,900 9,500 16,000 29,000 29,000 39,000 39,000 39,000 70,000
Ultimate Pressure  Pa(Torr)    10-7 (10-9)
Maximum throughput Argon Pa∙L/s (Torr∙L/s)  1.3x103 (9.8) 1.1x103(7.9)  1.2x103(8.9)  1.3x103(9.8)  2.0x103(15)  1.4x103(11)  1.6x103(12) 1.1x103(8.3) 1.7x103(12.8) 3.5x103(26)  1.4x103(31)  2.7x103(20)
Hydrog en 1.1x102(0.8)  2.4x102(1.8)  1.5x102(1.1)  4.1x102(3.1)  4.1x102(3.1)  4.5x102(3.4) 5.0x102(3.7)  1.3x103(9.6)  7.4x102(5.6)
Pumping capacity Argon Pa∙L (Torr∙L) 10x10-7 (10x10-7) 5.6x107 (4.2x105) 1.0x108 (7.6x105) 1.0x108 (7.8x105) 2.1x108 (1.6x106) 4.3x108 (3.3x106) 5.8x108(4.4x106)  8.1x108(6.1x106)  97.8x108(5.9x106)
  Hydrog en 1.5x105(11.3)  3.1x105(2.3x1 03)  1.0x106(7.6x103)  1.2x106(9.0x103)  9.8x105(7.4x103)  2.4x106(1.8x104) 4.6x106(3.4x104)  6.0x106(4.5x104)  8.5x106(6.4x104)  1.5x107(1.1x105)
Cool down time  Min(Hz)  45/40 (50/60) 80/70 (50/60)  100/90 (50/60)  110/100 (50/60)  85/75 (50/60)  110/100 (50/60)  120/100 (50/60) 180/160 (50/60)  160/140 (50/60)  180/170 (50/60)  165/150 (50/60)  150/135 (50/60)  240/200 (50/60)
Mounting flange      ISO-K DN100 UVG- 150,UFC- 203 UVG- 200,6𝐵ANSI, UFC-253 UVG-250  UVG- 300,10𝐵ANSI  UVG-400 C30VR UVG-500, 20𝐵ANSI,ISO UVG-500 VG-750
Compressor Unit    C10  C15R  C30VR C30VR C30PVRT C30PMVRTx1 C30VRx2
Weight  Kg.    14.5 19 25 29 40 61 69 72 115 125 175

 

CRYO Compressor

This product is necessary to operate the cryopump. Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

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Model  C10  C10AT  C15R  C30VR  C30MVR  C30PVRT  C30PMVR T  C40R

Electrical requirement
(ACV x ϕ XHz)

 200 x 3 x 50
220 x 3 x 60		 190 to
220 x 3 x 50190
to230 x 3 x 60		 200 x 3 x 50
220 x 3 x 60		 200 x 3 x 50 220 x 3 x 60 200 x 3 x 50 220 x 3 x 60 200 x 3 x 502
20 x 3 x 60
Power (kW) (50/60Hz)  1.5/1.7  3.3 / 4.1  5.0 / 6.0  5.7 / 7.5  5.2 / 6.5  6.5 / 8.0
Cooling method Water flow rate (L/Min) (20℃) 2 Cooling method
 Air-cooled		 3.5 5.5
Weight (Kg)  75 77 100 127 131 121 130  
Adsorber replacement cycle (Time)  24,000 30,000 24,000