MODEL: LR

Multi-Stage Roots Type Dry Vacuum Pump

Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.

Features

'Low temparature pump(Model:LR)
'The “Model:LR” pump is designed to shorten the pumping time for load lock, PVD processes and etc.
Excellent helium pumping capability
Canned motor for safety and ease of maintenance
Power failure protection
Pump withstands power interruptions of up to 500ms duration.
Superior resistance for corrosive gas(Model:HR/UR)
Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.
Communication function
Pump data including warnings and alarms are able to be exported. Extensive pump control is available.

Applications

Sputtering equipment, Vapor deposition equipment, etc.
Shorten the pumping time of load lock chamber
Backing pump for turbo-molecular pumps and mechanical booster pumps

Model		LR60	LR90	LR180	LR421	LR421-T
Max. pumping speed	50Hz	62 m3/h (1030 L/min)	112 m3/h (1860 L/min)	183 m3/h (3100 L/min)	440 m3/h (7333 L/min)	440 m3/h (7333 L/min)
	60Hz	80 m3/h (1333 L/min)	126 m3/h (2100 L/min)	237 m3/h (3950 L/min)
Ultimate pressure		5.0 Pa
Max. inlet pressure		Atmospheric pressure
Max. exhaust pressure		1.0 to Atmospheric pressure Pa
Inlet diameter (type CE)		VG50(KF50)	VG80(KF50)		VG100
Outlet diameter		KF40			VG50
Weight		180 kg	245 kg	335 kg	415 kg
Power *1	Three phase	200 VAC(50/60 Hz), 220 VAC(60 Hz)			180 - 240 VAC/380 - 440 VAC(50/60 Hz)
Current	At ultimate pressure	6.9 A (at 200V)	11.2 A (at 200V)	18.9 A (at 200V)	20.8 A (at 200V)
	At max. load	7.3 A (at 200V)	11.8 A (at 200V)	20.6 A (at 200V)	48.5 A (at 200V)
Cooling water Supply pressure		0.1 - 0.3 MPa			0.2 - 0.5 MPa
Cooling water In/Out differrencepressure		>0.1 MPa			>0.2 MPa
Cooling water Flow rate		>5.0 L/min			>4.0 L/min
N2 gas	Supply pressure	0.1 - 0.5 MPa
	Regula- ted pressure	0.05 - 0.1 MPa
N2 purge	Shaft purge	5 SLM
	Gas ballast	0 - 45 SLM			None	0 - 45 SLM

*1: Please specify voltage at the time of ordering.

Model		LR300	LR600	LR1200	LR1800	LR3601	LR3601-T(TT)	LR3601-R	LR3601- TR(TTR)
Pump	DRP	LR60	LR90	LR90	LR180	LR421	LR421-T	LR421	LR421-T
	MBP	PRC-03A	PRC-06A	PRC-012A	PRC-018A	PRC-036C	PRC-036C(-T)	PRC-036D	PRC-036D(D-T)
Max. pumping speed	50Hz	359 m3/h (5,980 L/min)	653 m3/h (10,900 L/min)	1,012 m3/h (16,900 L/min)	1,701 m3/h (28,350 L/min)	3,200 m3/h (53,333 L/min)
	60Hz	365m3/h (6,080 L/min)	701m3/h (11,700 L/min)	1,051m3/h (17,500 L/min)	1,784m3/h (29,700 L/min)
Ultimate pressure		0.67 Pa
Max. inlet pressure		Atmospheric pressure
Max. exhaust pressure		1.0 to Atmospheric pressure Pa
Inlet diameter (type CE)		VG80 (KF80)		VG100 (KF100)	VG150 (KF100)	VG150
Outlet diameter		KF40				KF50
Surface treatment of MBP		〇 *1	〇 *1	〇 *1	〇 *1	×	T:× TT:×	×	TR:× TTR:〇
Weight		275 kg	370 kg	420 kg	545 kg	660 kg	720 kg	660 kg	720 kg
Power *2	Three phase	200 VAC(50/60 Hz), 220 VAC(60 Hz)				180 - 240/380 - 440(50/60)
Current	At ultimate pressure	7.0 A (at 200V)	12.3 A (at 200V)	13.7 A (at 200V)	21.4 A (at 200V)	31.0 A(at 200V) 20.5 A(at 400V)		35.4 A(at 200V) 20.5 A(at 400V)
	At max. load	9.6 A (at 200V)	19.0 A (at 200V)	24.2 A (at 200V)	39.8 A (at 200V)	58.4 A(at 200V) 40.5 A(at 400V)		82.0 A(at 200V) 40.5 A(at 400V)
Cooling water Supply pressure		0.1 - 0.3 MPa				0.2 - 0.5 MPa
Cooling water In/Out differrencepressure		>0.1 MPa		0.1 - 0.3 MPa		0.2 - 0.5 MPa
Cooling water Flow rate		>5.0 L/min				>4.0 L/min
N2 gas	Supply pressure	0.1 - 0.5 MPa
	Regula- ted pressure	0.05 - 0.1 MPa
N2 purge	Shaft purge	5 SLM
	Gas ballast	0 - 45 SLM				None *3	0 - 45 SLM	None *3	0 - 45 SLM

1 MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
2 Please specify voltage at the time of ordering.
*3 Additionally, a pump with gasballast use is possible to quote. Please contact us for
　 the selection and quotation.