MODEL: LS
Dry Vacuum Pump
High pumping speed and Low power consumption
dry vacuum pump.
Model:LS is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.
Product Fillter
MODEL: LS
Features
- 'High pumping speed
High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced Low power consumption
ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)Built-in silencer achieves the noise level 61dB(A) or less.
Low running-cost
No shaft sealing gas.
*Purge gas is available with L Type.Pumping speed120 - 1200m3/h Class *With mecanical booster pump
Optimum model is selectable by depending on the application
Applications
C type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2 G14 Sputtering / Vapor deposition /
Lamination / Load lock room / TMP backing pump etc.
L type : Light process (LS***A-L)
Features :Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine / Vacuum drying /
Freezedrying / Ashing / General industrial use etc.
Model | （C：C Type） | LS120A | LS300A | LS600A | LS1200A | |||||
C | L | C | L | C | L | C | L | |||
Max.pumping speed | m3/h | 120 | 380 | 600 | 1000 | |||||
Ultimate pressure | Pa | ≦0.6 | ≦0.1 | |||||||
Power supply | 200V Class：3Phase,50/60Hz,AC200-240V or 400V Class：3Phase,50/60Hz,AC380-480V | |||||||||
Power consumption *1 | kW | 0.6 | 2.0 | 1.0 | 2.5 | 1.3 | 2.6 | 1.3 | 2.7 | |
Cooling water | L/min | >2.0 | >4.0 | |||||||
Purge gas flow rate | SLM | ‐ | 0 - 50 | ‐ | 0 - 50 | ‐ | 0 - 50 | ‐ | 0 - 50 | |
Max.water vapor | kg/h | ‐ | 1.5 | ‐ | 1.5 | ‐ | 1.5 | ‐ | 1.5 | |
Noise *1 | dB(A) | 61 | 61 | 62 | 64 | |||||
Inlet port | Inlet port | ISO-F-50 | ISO-F-80 | ISO-F-100 | ||||||
Outlet port | KF40 | KF40 | KF40 | KF40 | ||||||
Weight | kg | 142 | 220 | 242 | 266 | |||||
Applicable standard | CE, cTUVus | |||||||||
Standard accessory | Power connector, Waterproof cable clamp, Remote connector, Guard for power connector | |||||||||
Pump head option | Power supply：200V Class or 400V Class, Material of seal：FFKM(L type only) | |||||||||
External option | MBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible | |||||||||
1： At ultimate pressure (reference only)
2： Purge gas is not available with C Type.
*3： Max.water vapor tolerance is a value when purge gas is used.
Note)C type is not leakless.
Pumping Speed Curve
Dimenssion Drawing
