MODEL: CRYO Pump

MODEL: CRYO-U

Cryo Pump

A cryopump is a cryogenic vacuum pump designed to achieve conditions ranging from high vacuum to ultra-high vacuum. This pump efficiently captures gases by condensing and adsorbing them onto an internally installed cryogenic surface. One of the most significant features of the cryopump is its ability to provide a clean vacuum environment free from oil contamination.

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Features

  • Provide Ultra clean vacuum which is exclusive to our cryo pumps.
  • Vacuum any kind of gas.
  • No liquid helium needed means low running cost.
  • Can be installed in any orientation,
  • Easy operation.
  • Higher pumping speed compared to ion pumps or turbo molecule pumps.

Application

  • Vacuum deposition equipment.
  • Semiconductor process equipment.
  • Accelerating device
  • Surface analysis device.
  • Other equipment that require clean
  • high vacuum or ultra high vacuum
  • Sputtering equipment
  • Ion implanter
  • Nuclear fusion device
  • Space simulation chamber

Specifications

Model VMR-050
Ultimate pressure 4.0 X 10-２Pa
Main pump Mechanical Booster Pump　833 L/min　（ at 100Pa ）
Backing pump Oil Rotary pump　200 L/min
Inlet flange VG-40
Weight 42kg
External dimensions　 100V 241.4mm(W) X 534.5mm(D) X 399mm(H)
200V 241.4mm(W) X 534.5mm(D) X 399mm(H)

 

Utility

Model VMR-050
Power required Single phase　100 - 120V／200 - 240V　1.5kVA
Ground terminal D grade　（ground resistance/100MΩ or less）
Connection 100V： Vinyl cabtyre cable (with plug)　1.8m
200V：Vinyl cabtyre cable 　1.8m

 

Dimension drawing

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