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ULVAC oil diffusion pump PFL-type is designed and manufactured based on our extensive research and manufacturing experience. We meet customer's needs with 4 models line-up including 22B to 52B which are used in many high-vacuum production facilities, and its practical performance is highly appreciated.
| Model | PFL-22 | PFL-22TM | PFL-36 | PFL-52 | |
| Pumping speed | 10,000 L/sec | 10,000 L/sec | 34,000 L/sec | 70,000 L/sec | |
| Ultimate pressure *1 | 3.0×10-4 Pa | ||||
| Maxium forepressure | 16 Pa | 6.7 Pa | 16 Pa | ||
| Heating up time | 40 min | 60 min | 60 min | ||
| Oil | ULVOIL D-11,SX | ||||
| Oil capacity | 5 L | 13 L | 27 L | ||
| Cooling water temperature | 19～25℃ | ||||
| Water connections | Rc 1/2×2 | Rc 1/2×2 | Rc 1/2×2 | Rc 1/2×4 | |
| Rc 3/8×2 | |||||
| Water capacity | 12 L/min | 15 L/min | 38 L/min | 50 L/min | |
| Voltage | 200V / 3φ | ||||
| Pump power | 8 kW | 10 kW | Start-Up 22 kW | Start-Up 45 kW | |
| Stationary operation (Normal) 11 kW |
Stationary operation (Normal) 30 kW |
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| Heater type | coiled element heater |
coiled element heater |
coiled element heater |
coiled element heater |
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| Standard backing pump *2 | PMB-040C＋PKS-070 (PMB1200D＋PKS-030) |
PMB-040C＋ PKS-070 (PMB1200D＋ PKS-070) (PMB2400D＋ PKS-070) |
PMB-060C＋ PKS-070×2台 PMB2400D＋ PKS-070 |
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| Dimensions *3 | A | 480 mm | 480 mm | 725 mm | 1,000 mm |
| B | 630 mm | 630 mm | 1,022 mm | 2,000 mm | |
| H | 1,330 mm | 1,330 mm | 1,732 mm | 2,845 mm | |
| Inlet | VG550 | VG550 | VG900 | VG相当 52inch | |
| Outlet | VG150 | VG200 | VG250 | VG350 | |
| Weight | 290 Kg | 650Kg | 1400Kg | ||
| Oil level gage | View port (Slight glass) |
View port (Slight glass) |
View port (Slight glass) |
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| Themal switch option | available | available | available | ||
| Themal switch operating temperature | 180 ℃ | 110 ℃ | 110 ℃ | ||
Water Cooling Baffle(PFL)
| Model | BW-22 | BW-36 | BW-52 | ||
| Conductance | 14,000 L/sec | 54,000 L/sec | 75,000 L/sec | ||
| Dimensions *3 | D | φ680 mm | φ1065 mm | φ1480 mm | |
| T | 101 mm | 113 mm | 165 mm | ||
| t | 26 mm | 28 mm | 35 mm | ||
| Water connections | Rc 3/8 | Rc 3/8 | Rc 1/2 | ||
| Water capacity | 3L/min | 5L/min | 5L/min | ||
| Weight | 28 kg | 66 kg | 200 kg | ||
*1 Ultimate pressure is measured with an ionization vacuum gauge when the cooling water
temperature is 20 ° C.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,
but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing （ 2D Drawing , 3D Drawing ）
in the ULVAC,Inc.website.
