MODEL: PST

MODEL: PST

Ion Pump

Sputter ion pumps utilize electric and magnetic fields to ionize gas molecules. These ionized molecules are accelerated by the electric field and collide with the surface of a solid target. This collision embeds the molecules into the surface, creating a vacuum. This process is particularly effective for the removal of inert and reactive gases.

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Features

  • Available for ultimate pressure (10-9Pa order) ULVAC achieved the order with
    test dome complying with ISO standards.
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra high vacuum
    (discharging maintained down to the ultra-high vacuum)

Application

  • Accelerators
  • Electron microscopes
  • Electron drawing device
  • Precision analyzers which dislike vibration

Specifications

Model PST-030CU PST-030AU PST-050CU PST-050AU PST-100CX PST-100AX PST-110AU PST-200CXII PST-200AXII PST-400CXII PST-400AXII
Target gas Standard gas Inert gas Standard gas Inert gas Standard gas Inert gas Standard gas Standard gas Inert gas Standard gas Inert gas
Pumping speed*
(Regenerating
evacuation speed)		 0.03m3/s
(N2 gas
pumping)		 0.013m3/s
(Ar gas
pumping)		 0.045m3/s
(N2 gas
pumping)		 0.016m3/s
(Ar gas
pumping)		 0.10m3/s
(N2 gas
pumping)		 0.05m3/s
(Ar gas
pumping)		 0.11m3/s
(N2 gas
pumping)		 0.2m3/s
(N2 gas
pumping)		 0.02m3/s
(Ar gas
pumping)		 0.36m3/s
(N2 gas
pumping)		 0.19m3/s
(Ar gas
pumping)
Ultimate pressure 10-9Pa 10-9Pa 10-10Pa
Operating pressure*3 <8.0×10-3Pa <5.0 x 10-3Pa <4.5x10-3Pa <3.8x10-3Pa <3.0x10-3Pa
Inner volume 0.67 X 10-3m3 1.3x10-3m3 3.3x10-3m3 6.5x10-3m3 11x10-3m3 14x10-3m3
Element number CU sell×1 AU sell×1式 CU sell×1 AU sell×1 CX sell×1 AX sell×1 AU sellx1 CX sell×2 AX sell×2 CX sell×4 AX sell×4
Connection flange type ICF070 ICF114 ICF152 ICF152 ICF203
Applied voltage DC+7.5kV DC+7.5kV
Power for
heater		 Single phase No setting AC200V, 300W AC200V, 320W No setting AC200V, 600W AC200V, 800W
Bake-out temparature 250℃ 250℃
Weight 9.5 kg 12kg 37kg 36.5kg 65kg 124kg
Dimension W x H x D 103×183×187 mm 153×204×241mm 155×336×340mm 171×387×293mm 296×361×376mm 296×544×376mm
Operating
environment		 Temparature 5~40℃ 5~40℃
Humidity 85% or less(without condensation) 85% or less(without condensation)
Pump fixing bolt hole 4 points-M5
Depth 10mm		 4 points-M8
Depth 6mm		 4 points-M6
Depth 15mm		 4 points-M8
Depth 15mm		 6 points-M8
Depth 15mm
Recommended controller GST-07L-B GST-07L-B

* Value when using GST-07L.

 

Dimension Drawing

PST-030CU_AU

PST-100CX_AX

PST-030CU_AU

PST-200CXII_AXII

PST-030CU_AU

PST-400CXII_AXII