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The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
| Model | UTM70B | UTM300B | |||||
| Pump | Cooing method | Natural air cooling |
Forced air cooling |
Natural air cooling |
Forced air cooling |
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| Flange size | Inlet *1 |
VG65, ICF114, ISO063-K | VG100, ICF152, ISO100-K | ||||
| Outlet | KF16 | KF16 | |||||
| Pumping speed (without a protective net) |
N2 | 70 L/s | 280 L/s | ||||
| He | 60 L/s | 270 L/s | |||||
| H2 | 49 L/s | 220 L/s | |||||
| Ultimate pressure *2 |
After baking | - *3 | 10-8Pa | - *3 | 10-8Pa | ||
| Before baking | 10-6Pa | 10-6Pa | 10-6Pa | ||||
| Max. compression rate | N2 :>1×109, He : 4×107, H2 : 4×105 | N2 :>1×109, He : 7×106, H2 : 1×105 | |||||
| Max. pressure at inlet *4, *5, *6 |
N2 | 0.43Pa | 1.1Pa | 0.06Pa | 0.7Pa | ||
| Max. pressure at outlet *4, *5, *7 |
N2 | 300Pa | 900Pa | 100Pa | 1000Pa | ||
| Continuous running maximum flow *8 |
Without gas purge |
N2 | 15sccm *9 | 40sccm *9 | 10sccm *10 | 100sccm *10 | |
| Without gas purge |
Ar | - | 10sccm *9 | - | 30sccm *10 | ||
| With gas purge |
- | 15sccm *9 | - | 40sccm *10 | |||
| Recommend backing pump (when evacuating 10SCCM) *11 |
>60L/min | >120L/min | |||||
| Weight | VG：3.3kg, ISF：3.0kg, ISO：5.0kg | 6.0kg / 9.0kg | 6.3kg / 9.3kg | ||||
| Rotation speed | 87000rpm | 60000rpm | |||||
| Start-up time（Up to 80%） (DC24V. Back pressure:5Pa or less） |
1.7 min | 3.5 min | |||||
| Surface treatment *12 | None | ||||||
| Mounting direction | Free direction | ||||||
| Noise *13 | <48dB(A) | <50dB(A) | |||||
| Controller | Input power source | DC24V ±5%, 120W | DC24V ±5%, 180W | ||||
| Contact input and output signal |
REMOTE(D-sub 15 pin male) Digital input:4 points.Output:4 points.Analog output:1 point. |
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| Serial communication | RS-485(D-sub 15 pin male, shared with REMOTE) | ||||||
| LED Display | POWER,NORMAL,ALARM | ||||||
| Switch | START/STOP,RESET | ||||||
| Variable rotational frequency/ speed | Change of operation rotation speed number is possible between 25% and 100% from the pump spec by 0.1% step. |
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| Abnormal operation detection |
Detecting alarm and warning. | ||||||
| Protection circuit | Indicating alarm and warning. | ||||||
| Standard accessories | Instruction Manual(CD-R), Protective net(Only VG and ICF, ISO flange protective net is built in the gasket.), Gasket(inlet flange), Dust cap(for inlet, outlet and connector) |
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| Applicable standard | CE, TUVus | ||||||
| *1 | Please choose inlet flenge when ordering. |
| *2 | Calculated by using 2 stage vacuum pump as a back pump. |
| *3 | Baking is available only for forced air cooling type with ICF flange. |
| *4 | Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change. |
| *5 | Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time. |
| *6 | Maximum inlet port pressure which can accept continuous running. |
| *7 | Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm. |
| *8 | Value when ambient temperature is 5 - 25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm. |
| *9 | The vakue measured by using 60L/min vacuum pump as back pump. |
| *10 | The vakue measured by using 120L/min vacuum pump as back pump. |
| *11 | Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases. |
| *12 | Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases. |
| *13 | This value is measured by ULVAC standard for ISO flange type. |
UTM-70B
UTM-300B
