MODEL: UTM-MS

MODEL: UTM-MS

Turbo Molucular Pump

This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.

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Features

  • Separated pump body and controller
    The controller can monitor the operating status and support various communication standards.
  • Free mounting direction
    Free mounting direction makes the system design flexible.
  • Pumping speed 300L/s to 4000L/s class lineup
  • Pump rotation variable from 25% to 100%
    Enabling the pressure adjustment in a chamber by changing the rotation speed.
  • High durability and safety
    Safety confirmation tests are passed, such as air rushing-in test and touch down test.

Application

  • Main vacuum pumping system for equipment
    - Semiconductor equipmen
    - Evaporator,Sputtering syste
    - Analytical equipment,Experimental device and etc.
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • General use for high vacuum evacuation system.

Specifications

Model UTM300A-MS UTM400A-MS UTM800A-MS UTM1000A-MS UTM1300A-MS UTM1500A-MS UTM2400A-MS UTM3400A-MS UTM4300A-MS
Inlet port VG100 / ICF152 VG150 / ICF203 VG200 / ICF253 VG200 / ICF253 VG250 VG300 / VG350 VG350
Outlet port KF25 KF40 KF40
Cooling method Water cooling Air cooling Water cooling Air cooling Water cooling Air cooling Water cooling Air cooling Water cooling        
Ultimate pressure *1 Pa 10-7 10-8 10-7
Pumping speed *2 N2 L/s 320 420 800 1080 1300 1500 2100 3200 4400
Ar L/s ー ー 2000 3100 4200
He L/s 340 360 800 930 1050 1200 2240 3100 ー
H2 L/s 320 340 700 790 750 800 1770 2200 2600
Compression rate N2 1×109 6×108 1×109
He 8×104 1×104 7×104 1×105 3×104
H2 1×104 4×103 1×103 3×103 6×103 2×103
Max inlet pressure *3 Pa 200 1.3 200 1.3 400 1.3 400 1.3 133 40
Max outlet pressure *3 Pa 400 40 400 40 665 40 665 40 270 270
Rotation speed rpm 45000 35000 30300 27000 27600 24000
Start-up time 5minutes or less 7minutes or less 11minutes or less 12minutes or less 18minutes or less
Mounting position In any desired direction In any desired direction
Surface treatment Nickel plating Nickel plating
Cooling water Flow rate L/min 01-Mar ー 01-Mar ー 01-Mar ー 01-Mar ー 01-Mar 02-Apr
Pressure MPaG 02 - 0.5 ー 02 - 0.5 ー 02 - 0.5 ー 02 - 0.5 ー 02 - 0.5
Noise dB(A) 60 60 57 60
Weight kg 14 33 32 39 42 70 84 105
Recommended backing pump 200L/minor more 500L/minor more 600L/minor more 1300L/minor more 1500L/minor more
Controller Composition Separate type Separate type
Input electric power Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz） Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
Max power 0.55 1 1 1.5
Speed variation　 Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%） Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
Communication Contact Contact
Serial：RS-232C / RS-485 Serial：RS-232C / RS-485
Weight kg 8 8

*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.

CRYO Compressor

This product is necessary to operate the cryopump. Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

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Model  C10  C10AT  C15R  C30VR  C30MVR  C30PVRT  C30PMVR T  C40R

Electrical requirement
(ACV x ϕ XHz)

 200 x 3 x 50
220 x 3 x 60		 190 to
220 x 3 x 50190
to230 x 3 x 60		 200 x 3 x 50
220 x 3 x 60		 200 x 3 x 50 220 x 3 x 60 200 x 3 x 50 220 x 3 x 60 200 x 3 x 502
20 x 3 x 60
Power (kW) (50/60Hz)  1.5/1.7  3.3 / 4.1  5.0 / 6.0  5.7 / 7.5  5.2 / 6.5  6.5 / 8.0
Cooling method Water flow rate (L/Min) (20℃) 2 Cooling method
 Air-cooled		 3.5 5.5
Weight (Kg)  75 77 100 127 131 121 130  
Adsorber replacement cycle (Time)  24,000 30,000 24,000