Select your language
A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
| 50Hz/60Hz | ||
|---|---|---|
| Ultimate pressure | 10-5 Pa | |
| Weight | 17 kg | |
| Inlet flange | ISO63（Option：KF-40） | |
| Ambient temperature | 8 - 38 ℃ | |
| External dimensions | 340 mm(W) × 340 mm(L) × 355 mm(H) | |
| RoHS directive | ✓ | |
