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Model: Digital DC

Model: Digital DC

Pulsed and DC power supply systems

The Digital "Model:DC" is a DC power supply for sputtering. It is composed of reliable components and circuits. It is a highly reliable power supply that is ideal for plasma loads by reflecting the know-how we have cultivated over many years, including the application of power supplies, in the design.

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Features

  • A wide range of advanced options
  • Lightweight and space-saving design
  • Lineup includes 800V and HV specifications for output voltage range (10/20kw: 1000V / 2/4kw: 900V)
  • Output control with a thorough understanding of plasma
  • Forced air cooling system eliminates the need for cooling water
  • Equipped with excellent ARC function and high-speed ARC cut-off circuit
  • Up to 12 units (240 kW) can be operated in parallel（10/20kW products only）
  • Compliant with CE, KC, SEMI F47, RoHS

Specifications

Model DC-2-D DC-4-D
Input Specifications Input voltage 3-phase AC200V/220V
Input Capacity 3.5kVA or less 6.2kVA or less
Output Specifications Rated power 2kW 4kW
Ratedcurrent 5A 10A
Rated voltage 800V/900V*
Ignition voltage 1200V
control Control accuracy ±1％ of set point (In our prescriptive resistance value.)
Control Warranty Coverage Constant power control, 1 to 100％ of rated power value
Interface Analog/Digital, Serial communication（RS232C or RS485）, EtherCAT（Option）
Parallel operation No
Cooling method Forced air cooling
Dimensions(W×D×H) does not contain protrusions 241×610×133（mm）
Weight 15kg
Standard CE, KC, SEMI F47, RoHS（Europe）

*Normally, 800V and 900V specifications are optional.

Model DC-10-D DC-10-DH DC-20-D DC-20-DH
Input Specifications Input voltage 3-phase AC208V
Input Capacity 13.5kVA or less 25kVA or less
Output Specifications Rated power 10kW 20kW
Ratedcurrent 25A 18A 50A 40A
Rated voltage 800V 1000V 800V 1000V
Ignition voltage 1500V
control Control accuracy The higher of ±0.5% or less of the rated output or ±1% of the set value
High accuracy options are also available
Control Warranty Coverage 10-100% of rated power value
High accuracy options are also available
Interface Analog/Digital, Serial communication（RS232C or RS485）, EtherCAT（Option）
Parallel operation Yes
Cooling method Forced air cooling
Dimensions(W×D×H) does not contain protrusions 483×630×133（mm）
Weight 29kg 36kg
Standard CE, KC, SEMI F47, RoHS（Europe）