Model: Qulee with YTP-H

Model: Qulee with YTP-H For Vacuum (1, 10, 100, 500, 3000Pa)

High Performance Process

A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.

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Features

  • Most Appropriate for R&D Applications
    Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar）
  • Communication interface Ethernet compatible
  • Integrated Display No need for PC
  • Simple Operation "One Click" function
  • Bake Out
    Max 250℃ (482°F) high temperature bake (300℃ (572°F) when the sensors are removed)
  • Degas Function　Electron bombard degas
  • Maintenance
    Filament, ion source, and secondary electron multiplier are easy to replace
  • Protection and Maintenance Features
    Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031)
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 8/10/11)
  • Applicable Standard　Conforms with CE

Applications

  • Various types of gas analysis for research and development
  • Gas monitoring of PVD system during processing
    Residual gas analysis in PVD system
  • Residual gas analysis for high vacuum pumping equipment, etc.

Specifications

Qulee main body Select from BGM2-101 / 102 / 201 / 202, HGM2-302
＊Refer to the product catalogue for the specification of Qulee
Software Qulee QCS Ver. 4.2 later (Windows 8/10/11)
Max sampling pressure 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa
22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr
30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar
＊Atmospheric pressure type can be used only under the atomospheric condition
＊3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure
Vacuum type Gas introduction type
(3000Pa ～1Pa type)		 Manual Bellows Valve (2 Systems: Orifice Line/Direct Line) Interlocking Flange: ICF070
Automatic Solenoid Valve (1 System: Orifice Line) Interlocking Flange: NW16
Variable leak valve type Sampling pressure Power-supply voltage AC100-240V
Pump unit desktop YTP Desktop YTP
(YTP70A-D)		 Turbo molecular pump 70L/s (N2)
Dry pump(Roughing) 19L/min(Diaphragm pump)
Power-supply voltage AC100-240V
Accessories AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Bolt set for fixing flange, Gasket (ICF114G,ICF070G), Various fixing screws
Options Ionization gauge package(SH200-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(16 ports)(*3),Floor cart(*4)

＊1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V.
＊2 Make sure to use a base stage when installing desktop YTP.
＊3 AC adapter is necessary for an optional switching hub.
＊4 Please set up the floor cart by yourself.