Process Gas Monitor
Gas analyzers (process gas monitors) are primarily used in semiconductor manufacturing and electronic device production processes to monitor gas components and concentrations in real-time. The main features are as follows: They measure specific gas components with high precision, helping control the process. They monitor the state of process gases in real-time, enabling early detection of abnormalities and optimization of processes.
Software for Gas Analysis
"Qulee QCS" is a software package for gas analyzers and process monitors manufactured by ULVAC."Qulee QCS" is suitable for all Quadrupole gas spectrometers made by ULVAC.
Older software can be upgraded to this QCS version.Data acquisition and saving data is carried out by simple key s trokes.
CVD / ALD / Etching Process
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
CVD / ALD / Etching Process
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
Atmospheric Pressure Environmental Process
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
High Pressure Process
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
High Perfornance Process
ULVAC's new "Model:Qulee HGM2" residual gas analyzer with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)
Basic Process
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
Sputtering Process
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).