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Model: A2K

Model: A2K

Pulsed and DC power supply systems

The "Model:A2K", which is available as an external unit for DC power supplies, is an abnormal discharge prevention unit that converts a DC output into a pulse output and neutralizes the charge on the target.

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Features

  • High power can be input by reducing abnormal discharge.
  • Substrate damage caused by arcing can be reduced.
  • Can be connected to existing devices *1
  • A2KH-25U: 1kHz - 20kHz, A2K-20K/40K: 1kHz - 50kHz
  • Output pulse synchronization of multiple A2K units is possible 2 3
  • A2K-20K and 40K can operate in parallel up to 6 units each.

Application: Pulse Synchronization System

PULSEsystem.jpg

When the cathodes are close to each other in the same chamber and the cathodes are opposing each other, or when the discharges of multiple A2Ks are interfering, the phase control function can be used to prevent interference of the discharge by setting the reverse pulse of the A2K to the same phase 3 4


*1: Can be connected to our DC power supply
*2: Pulse synchronization and parallel operation by mixing A2KH-25U, A2K-20K, and 40K are not possible
*3: A2KH-25U requires an external synchronization unit (PHSM/PHSS)
*4: A2K-20K/40K requires an optical sync cable (Pulse link cable)

Specifications

Model A2KH-25U A2K-20K A2K-40K
Control Power Input Input voltage Single-phase AC90-110V Single-phase AC100-240V
Input Capacity 100VA or less 400VA or less
Input Specifications Operating Voltage -100 - -800V
Operating current 25A 50A 100A
Rated input power 10kW 20kW 40kW
Output Specifications Frequency 1k-20kHz 1k-50kHz
Reverse voltage pulse width 5μs/10μs　Switching with internal switch 3μ-18μs (limited oscillation frequency)
Oscillation mode Continuous/1 Pulse/Pass
Output Format For Single Target
Cooling method Forced air cooling
Dimensions(W×D×H) does not contain protrusions 238×450×149（mm） 480×630×177（mm）
Weight 16kg 30kg 45kg
Standard RoHS (Europe) CE, KC, SEMI F47, RoHS (Europe)