Product Fillter

Model: MFU

Model: MFU

Pulsed and DC power supply systems

The MFU, which is available as an external unit for DC power supplies, is an MF power supply for use in sputtering of dual cathodes. It is effective not only for metal films but also for reactive deposition. Stable sputtering is achieved without the loss of the anode.

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Features

  • Available in the range of 10kHz - 100kHz *1
  • Master/slave connection enables parallel operation of up to 6 units
  • In combination with our DC power supply, a discharge method compatible with dual cathodes can be easily realized.

    *1: At oscillation frequencies exceeding 60kHz, output power, voltage, and current are limited.

Specifications

Model MFU-20K
Control Power Input Input voltage Single-phase AC100-240V
Input Capacity 400VA or less
Input Specifications Operating Voltage 0 - -1000V
Operating current 50A
Rated input power 20kW
Output Specifications Frequency 10k-100kHz（Output limit above 61kHz）
Rated output voltage 1000V（RMS）
Rated output current 50A（RMS）
Output Format For Dual Target
Cooling method Forced air cooling
Dimensions(W×D×H) does not contain protrusions 480×630×177（mm）
Weight 29kg
Standard CE, KC, SEMI F47, RoHS(Europe)