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Model: RMG-1303

Model: RMG-1303

RF Power Supply

The RMG-1303 is a 13.56MHz, 300W RF power supply with built-in output matcher for plasma processes such as RF sputtering and plasma CVD etching. The integration of the matcher and the RF power supply makes it smaller and lighter. It can be controlled from low output, and can be used in a wide range of fields, from R&D applications to mass production equipment.

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Features

  • Controllable from power as low as 1W
  • 500Hz - 100kHz pulse RF output function as standard Capable of control with low output power
  • Equipped with an external synchronization pin as standard
  • Single-phase 100V - 220V / 50Hz - 60Hz wide range of inputs
  • 200mm×200mm×350mm/10kg, compact and lightweight power supply
  • CE, KC, SEMI F47, SEMI S2, RoHS

Specifications

Model RMG-1303
Power supply function section Input voltage Single-phase AC100-220V
Input Capacity 700VA or less
Frequency 13.56MHz±0.01%
Forword power 300W (At 50Ω load)
Matching function section Rated power 300W
Rated current 10Arms
Rated voltage 2500Vpp/-2500Vdc(Standard) *1
Output Electrodes/Options 2-M4(standard)/N,HN,DIN7/16 *2
Common section Cooling method Forced air cooling
DimensionsDimensions
(W×D×H) does not contain
protrusions		 200×350×200（mm）
Weight Approx.10kg
Standard CE, KC, SEMI F47, SEMI S2, RoHS（Europe）

*1 The rated voltage can be changed as an option.
*2 It is possible to change to the connector output type as an option.