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Model: SG

Model: SG

Pulsed and DC power supply systems

It is designed for plasma generation such as LF power supply, dual cathode sputtering, plasma CVD, etc., and can continuously output rated power at frequencies from 20kHz to 100kHz for plasma loads. Highly reliable and ideal for plasma loads that reflect know-how including power supply applications cultivated over many years in the design Power supply.

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Features

  • You can set the oscillation frequency from 20kHz to 100kHz in 1kHz increments. *1
  • It is possible to output to the output range of the specifications without changing the transformer tap.
  • Pulse output control is possible.
  • External analog control, control by controller, etc. are standard equipment, and various controls such as S232C, RS485, and EtherCAT are possible with OPTION.
  • *1：There is a limit on the output voltage/current depending on the frequency setting conditions.

Specifications

Model SG-10-4
Input Specifications Input voltage 3-phase AC380-440V
Input Capacitance 13.2kVA or less
Output Specifications Maximum power rating 10kW
Rated current 32A
Rated voltage 1000Vrms
Oscillation frequency 20k-100kHz
Control Control Accuracy ± 100W (voltage 30V or more, current 1.5A or more)
Other conditions apply
Control Warranty Coverage 10-100% of rated power value(Voltage 30V or more, current 1.5A or more)
External control Analog/Digital, serial communication (RS232C or RS485), EtherCAT (optional)
Cooling method Water cooling: 7 L/min or more
Dimensions(W×D×H) does not contain protrusions 483×500×177（mm）
Weight 40kg
Standard CE, SEMI F47, RoHS（Europe）