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Model: Qulee BGM2-101 /102 /201 /202

Model: Qulee CGM2-101 / 102

Sputtering Process

The "Qulee" (pronounced "KLEE") is ULVAC's latest model for residual gas analysis and gas monitoring during the process. Feedback from equipment engineers on each production line has been incorporated into the new product design in pursuit of simplicity.
Measurements can be made with high accuracy at the process pressure of the sputtering equipment (less than 1 Pa) without using a differential exhaust system.

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Features

  • Ideal for process monitoring of various sputtering sysytem
  • Monitoring the Air Leak
  • Management of residual moisture
  • Cleaning fluid residue
  • Galden® and other gas leaks
  • Monitoring of residual hydrocarbons
  • No differential pumping system required (less than 1 Pa at 7.5 x 10-3 Torr/1 x 10-2 mbar)
  • Built-in display: PC-free
  • Highly sensitive leak test possible (CGM2-102).More leak testing.
  • Various leak tests available (Helium leak test, air leak test, assembly test)
  • Total pressure measurement (ionization gauge) possible
  • Includes a Quick Install Package system (QIP). Automatic measurement package (see option catalog for details)
  • Qulee QCS is Included : This software is included and compatible with (Windows 8/10/11)
  • Conforms with CE

Applications

  • Ideal for residual gas analysis, process monitoring and impurity (H2O) management of sputtering equipment
  • For leak testing of sputtering equipment.

Specifications

Model CGM2-051 CGM2-052 CGM2-101 CGM2-102
Mass filter type Quadrupole
Mass range 1 to 50 amu 1 to 100 amu
Resolution M/ΔM=1M (10% P.H.)
Detector type Faraday cup (FC) EM Tube (SEM) /
Faraday cup (FC)		 Faraday cup (FC) EM Tube (SEM) /
Faraday cup (FC)
Sensitivity 0.1uA/Pa SEM: 0.1mA/Pa 0.1uA/Pa SEM: 0.1mA/Pa
13.3 uA/Torr SEM: 13.3 mA/Torr 13.3 uA/Torr SEM: 13.3 mA/Torr
10 uA/mbar SEM: 10 mA/mbar 10 uA/mbar SEM: 10 mA/mbar
Minimum detectable
partial pressure		 1×10-7 Pa SEM: 1×10-10 Pa 1×10-7 Pa SEM: 1×10-10 Pa
7.5×10-10 Torr SEM: 7.5×10-13 Torr 7.5×10-10 Torr SEM: 7.5×10-13 Torr
1×10-9 mbar SEM: 1×10-12 mbar 1×10-9 mbar SEM: 1×10-12 mbar
Maximum operating
pressure		 FC: 2 Pa FC: 2Pa,
SEM: 1×10-２Pa		 FC: 2 Pa FC: 2 Pa,
SEM: 1×10-２Pa
FC: 1.5×10-2 Torr FC: 1.5×10-2
SEM: 7.5×10-5 Torr		 FC: 1.5×10-2 Torr FC: 1.5×10-2
SEM: 7.5×10-5 Torr
FC: 2×10-2 mbar FC: 2×10-2
SEM: 1×10-4 mbar		 FC: 2×10-2 mbar FC: 2×10-2
SEM: 1×10-4 mbar
Linearity 1Pa
7.5×10-3 Torr
1×10-2 mbar
Total pressure function Capable
Degas function Electron bombard type 300V, 5mA
One Click function Capable / He / H2O / N2 / O2 / Any gas
One Click leak test function Capable
Power input DC24V ±10% 50W
Maximum sensor
operating temperature		 120℃ (248℉)
Maximum sensor
operating temperature		 250℃ (482℉)
Operating temperature
range		 10 to 40℃ (50 to 104F)
Operating humidity
range		 15 to 80 % (not condensing)
Communication interface Ethernet
Software Qulee QCS Ver. 4.2 later (Windows 8/10/11)
Applicable standard CE