MODEL: HR
Multi-Stage Roots Type Dry Vacuum Pump
Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.
Product Fillter
MODEL: HR
Multi-Stage Roots Type Dry Vacuum Pump
Features
- Uniform high temparature distribution pump
The “Model:HR” pump is designed to keep uniform high temparature for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
The “Model:UR” pump is enable to keep higher temparature than “Model:HR”. - Excellent helium pumping capability
Canned motor for safety and ease of maintenance - Power failure protection
Pump withstands power interruptions of up to 1000ms duration. - Superior resistance for corrosive gas：
Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses. - Communication function：
Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
Applications
- CVD equipment
- Etching equipment
- Ashing equipment
- ALD, ALH etc
Model | HR60 | HR90 | HR300 | HR600 | HR1200 | ||
Pump | DRP | HR60 | HR90 | HR60 | HR90 | HR90 | |
MBP | - | - | PRC-003A | PRC-006A | PRC-012A | ||
Max. | 50Hz | m3/h | 62(1030) | 112(1860) | 359(5,980) | 653(10,900) | 1,012(16,900) |
60Hz | m3/h | 80(1333) | 126(2100) | 365(6,080) | 701(11,700) | 1,051(17,500) | |
Ultimate pressure | Pa | 5 | 0.67 | ||||
Max. inlet pressure |
| Atmospheric pressure *1 | |||||
Max. exhaust pressure | Pa | 1.0 to Atmospheric pressure | |||||
Inlet diameter (type CE) | VG50(KF50) | VG80(KF50) | VG80(KF80) | VG100(KF100) | |||
Outlet diameter | KF40 | ||||||
Weight | kg | 180 | 245 | 275 | 370 | 420 | |
Power | Three | VAC | 200(50/60), 220(60) | ||||
Current | At | A | 7.1 | 11.2 | 7.8 | 12.9 | 15.4 |
At max. | A | 7.3 | 11.8 | 8.1 | 13.8 | 18.9 | |
Cooling water Supply | MPa | 0.1 - 0.3 | 0.1 - 0.3 | ||||
Cooling water In/Out | MPa | >0.1 | |||||
Cooling water Flow rate | L/min | >5.0 | |||||
N2 gas | Supply | MPa | 0.1 - 0.5 | ||||
Regula- | MPa | 0.05 0.1 | |||||
N2 purge | Shaft | SLM | 5 | ||||
Gas ballast | SLM | 0 - 45 | |||||
*1 HR300, HR600 and HR1200 should all be operated below 200Pa (1.5 Torr).
Dimension Drawing
