Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
4.0 x 10-1Pa = 3.0 × 10-3 Torr
*1 Standard model are without surface treatment (Anodic oxidation coatings).
Optionaly, with surface treatment model is able to select.
*2 Measured by Pirani vacuum gauge using a standard backing pump and standard vacuum oil.
( Apprx. 4.0×10-2 Pa when measured with a McLeod vacuum gauge. )
*3 Only PMB100D is able to choose the motor of 200V class or Multiple voltage.
Multi-voltage selection for explosion-proof motor is not available.
*4 Oil for Air-cooled specifications is SMR-100. Oil option : Optionaly, Mineral oil (SMR-100),
Fluorine oil (J25F) type is able to select.
*5 By the selection of inverter mounting model, the operation of entire pressure range will be capable.
When ordering the inverter specifications, Specify Air-cooled or Water-cooled specifications.
Air-cooled operation is not possible to drive with a water-cooled inverter.
For PMB600D, 1200D and 2400D, continuous operation more than 1 hour at pressure range of
300 Pa to 4,000 Pa may cause damage to the pump.
Select water cooling type in case to use in such condition.
*6 Use in an environment where there is no condensation.
*7 For other dimensions, visit ULVAC web and refer to the posted CAD data.