Model: VFR
Pendulum Valve
ULVAC's "Model:VFR" Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Product Fillter
Model: VFR-400 / VFR-500
Features
- Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
- The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
- The ULVAC “Model:VFR” valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).
Applications
- Large display manufacturing systems
- OLED manufacturing systems
- Other vacuum systems as main valve and gate valve
Specifications
Specifications
| Model | VFR-400 | VFR-500 | |
| Common port diameter | Φ400mm | Φ500mm | |
| Flange specification (JIS B2290 equivalency) | VF400 | VF500 | |
| Open/close specification | 2 positions | ||
| Open/close operation principle | Pneumatic | ||
| Open/close time | 8sec | 12sec | |
| Valve plate seal | Reverse pressure capable | ||
| Max valve plate seal differential pressure (at positive pressure) |
0.12 MPa | ||
| Max valve plate seal differential pressure (at reverse pressure) |
0.12 MPa | ||
| Max differential pressure when opening/closing (at positive pressure) |
0.5 kPa | ||
| Max differential pressure when opening/closing (at reverse pressure) |
0.5 kPa | ||
| Open conductance | 50000L/s | 90000L/s | |
| Pressure range | 1.0×10-5Pa1‐0.12MPa(abs) | ||
| Allowable baking temperature （at stopped position） |
Valve body | < 120℃ (248F) | |
| Cylinder | < 80℃ (176F) | ||
| Allowable ambient temperature | 10 to 80℃ (50 to 176F) | ||
| Allowable Gass temperature | 10 to 80℃ (50 to 176F) | ||
| Compressed air pressure | 0.50 to 0.70MPaG (72.5 to 101.5psi, 5.0 to 7.0bar) |
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| Compressed air supply port | Φ8 tube connection | ||
| Maintenance cycle | 100,000 | ||
| Mouting angle | Free | ||
| Main parts material | Valve body | AC4CH-T6 | |
| Seal plate | AC4CH-T6 | ||
| Seal material | Vacuum side | FPM | |
| Oil | Z300 | ||
| Weight | 98kg | 155kg | |
| Flange to flange dimension | 150mm | 170mm | |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200℃ (392F) and in closing position: 150℃ (302F).
*4 See instruction manual for detail.
*5 Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).
Drawing
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